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Environmental System


  • The first system supplier who introduced rotor system to semiconductor industry in Taiwan, we have highly experience with system integration for single/dual & series/parallel rotor system.
  • Unique rotor system supplier with ISO9001&14001,OHSAS18001 and SEMI-S2 certification.
  • Excellent R&D group have numbers of design patents about rotor and energy-saving.
  • Skid-mounted design.
  • Full temperature system testing in factory.
  • Up to 20:1 high rotor concentrate ratio and 8:1 turn-down ratio for oxidizer airflow volume control.
  • Excellent design team provide assessment services of safety (ex. L.E.L), function, system pressure balance, seismic restraints ( 0.5G ), operating cost ,etc.
  • 3 safety mode including rotor high temperature protection with N2 purge , FM sprinkler spray and oxidizer shut-off damper.
  • Standard 6 interlocks for oxidizer system safety, like oxidizer air pressure, oxidizer and combustion fan& flame status, fuel pressure, high systems temperature.
  • Rotor spray wash and 300℃ desorption available for high boiler pollutants(patented air seal).
  • Supply custom-design for different VOC exhaust industry.
  • Automatic system monitoring, easy operation like one-button start. Man-machine interface touch panel could completely monitor important operating parameters
  • Turnkey service for installation, start-up, regulation-compliance test, operation and maintenance training.