Environmental System

System Description

The Rotor Concentrator pilot system is a pollution control device designed to remove the low concentration volatile organic compounds(VOCs) from atmospheric circulation of semiconductor industry clean room. The system includes

• Concentration of the VOC using a Hydrophobic Zeolite Rotor ,and
• Desorb the concentrated volatile organic compounds(VOCs)gas viavarious types of heating device.
• The available flow rate of pilot system is 25 CMM.

Principles of Operation

• Solvent laden air drawn through the Honeycomb rotor where VOCs are removed from the airstream.
• After passing through the rotor, the cleaned air is discharged into the atmosphere or HVAC.
• The zeolite rotor turns continuously (1-6 rph) transporting adsorbed VOCs into a regeneration zone.
• At regeneration zone, the VOCs are removed by a small heated air stream.
• The regenerated zeolite is then rotated back into the process air stream.
• The concentrate is typically sent to a small oxidizer where the VOCs are converted to H2O and CO2.
• Heat exchangers are used to pre-heat the concentrate and provide the required heat needed to desorb the rotor and create additional fuel